Abstract

Superhydrophobic surface produced on polyimide and silicon by plasma enhanced chemical vapour deposition from hexamethyldisiloxane precursor

Plasma polymerisation of hexamethyldisiloxane (PPHMDSO) has been used to deposit micro- and nanostructured thin layers on silicon and polyimide substrates, using low-pressure and...

Int. J. Nanotechnol., 12( 8/9) - 597- 607 - 2015

http://www.inderscienceonline.com/doi/abs/10.1504/IJNT.2015.068881

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