Abstract

2-D Simulation of dual frequency capacitively coupled helium plasma, using COMSOL Multiphysics

A two-dimensional (2D) self-consistent fluid simulation of dual frequency capacitively coupled radio discharges of helium plasma is presented. The model solves the continuity...

IEEE Trans. Electr. Insul, 20(5) (2013) - 1616-162 - 2013

http://ieeexplore.ieee.org/document/6633691/

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