Abstract: Humidity sensitive layers elaborated from pure HMDSO and TEOS by PECVD technique have been studied. Humidity sensing properties including impedance relative humidity (RH) and current RH characteristics were investigated. TEOS films show higher sensitivity and excellent linearity over the explored range of humidity (20–95% RH). However, HMDSO films exhibits a small response and recovery of about 8 and 34 s for humidification and desiccation, respectively, in addition to very low hysteresis (2%). Structural analyses of sensitive layers were characterized by Fourier transform infrared spectroscopy (FTIR).
N° Revue: Defect and Diffusion Forum Vol. 354 (2014) - Pagination: 41-47 - Date: 2014
URL: http://www.ttp.net/1012-0386.html
Mots cles: Electrical Characterization, HMDSO, Humidity Sensor, TEOS
co_auteurs: Noubeil Guermat , Azzedine Bellel , Salah Sahli, Yvan Segui, Patrice Raynaud